The microscopic photos of the results for 10, 5 and 2 um line/space patterns. The thickness of the positive photoresist AZ5214 has been verified using stylus measurement.

The microscopic photos of the results for 1.8, 1.6, 1.5 and 1.4 um line/space patterns.

The microscopic photos of the results for 1.3, 1.2, 1.1 and 1 um line/space patterns.

The resolution of our mask aligner is 1.1 um.